Special Issue/Functional Glasses Based on Surface Modification. Thin Films for Optical Devices.

Electrical and Optical Properties of PECVD SiC Thin Films for Surface Micromachined Devices

In this paper, the electrical and optical properties of undoped and in-situ doped amorphous SiC films are presented. The films are prepared by using mixture of methane (CH4) and silane (SiH4) as C and Si sources, phosphine (PH3) and diborane (B2H6) as doping gases. The bandgap, optical constant and absorption coefficient of the films are measured and a strong dependence on the layer composition...

Stripe glasses in ferromagnetic thin films

Modification of aluminum thin films

We have utilized several processing techniques to locally modify the superconducting transition temperature and the normal state resistivity of aluminum thin films. The techniques of ion implantation, application of a magnetic overlayer, and reactive ion etching have been used to fabricate S-N interfaces with controlled differences in transition temperatures and normal state resistances. Lithog...

Oxide Thin Films for Tunable Microwave Devices

Oxide thin ®lms have been studied for frequency and phase agile electronics. The electric-®eld tuning of microwave devices employs ferroelectrics, while the Magnetic-®eld tuning uses ferrites. The critical material parameters for ferroelectric thin ®lms are the tunability of the dielectric constant and the dielectric loss. This paper describes the current understanding of the fundamental mechan...

Magneto-Optical Thin Films for On-Chip Monolithic Integration of Non-Reciprocal Photonic Devices

Achieving monolithic integration of nonreciprocal photonic devices on semiconductor substrates has been long sought by the photonics research society. One way to achieve this goal is to deposit high quality magneto-optical oxide thin films on a semiconductor substrate. In this paper, we review our recent research activity on magneto-optical oxide thin films toward the goal of monolithic integra...